Mitutoyo 554-003 WLI-Unit-010 White Light Interference Optical Unit
SKU:Code: 554-003
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- brand Mitutoyo
- type White Light Interference Optical Unit
- mass 2.3kg Controller / 1.7kg Sensor head
- cable length 10 Meters
- z motion range 8000 Microns
- measurement mode High Resolution
- wli measurement z range 1700 Microns
- throughput at 20 micron range 6.0 s
- z resolution 4 nm
- z repeatability σ 40 nm
The WLI-Unit-010 is a compact white light interferometry (WLI) measurement system designed for non-contact, high-precision surface texture analysis. It enables accurate 3D shape measurement and 3D surface roughness measurement, making it ideal for advanced metrology and micro-topography inspection.
Using white light interference technology, the system provides high Z-axis resolution even when using low-magnification objective lenses, allowing reliable measurement across a wide range of surface types. Because the detection method is not dependent on the numerical aperture (NA) of the objective, the system can accurately measure high aspect ratio structures.
The WLI-Unit-010 offers strong resistance to vibration disturbances, ensuring stable measurement performance in demanding industrial environments. Its compact and lightweight design, combined with compatibility with the WLI Plan Apo objective lens series, allows easy integration into precision inspection and metrology setups.
The 10 m cable length provides increased installation flexibility, making the system suitable for larger inspection setups or installations where the controller must be located further from the measurement head.
Key Features
Non-contact surface measurement using white light interferometry
Enables 3D shape and 3D roughness measurement
High Z-axis resolution even with low-magnification lenses
Suitable for high aspect ratio shape measurement
Measurement method not dependent on optical NA
High robustness against vibration disturbances
Compact and lightweight design
Compatible with WLI Plan Apo objective lenses
Specifications
Model: WLI-Unit-010
Applicable objective lenses: WLI Plan Apo series
Tube lens magnification: 1X
Focal range: 100 mm
Power consumption: Max. 20 W
Rated voltage: AC 100–240 V / 50–60 Hz
Cable length: 10 m
Measurement Performance
Z motion range: 8000 µm
WLI Measurement Z Range
High Throughput: 2100 µm
Standard: 1900 µm
High Definition: 1700 µm
Measurement Speed (20 µm range)
High Throughput: 3 s
Standard: 4 s
High Definition: 6 s
Z resolution: 4 nm
Z repeatability (σ): 40 nm
System & Interface
Scanning mechanism: Mitutoyo Objective Lens Scanner
Interface: WLI-Unit sensor head terminal / stop connector / Gigabit Ethernet (2 channels)
Software
WLIPAK: WLI-Unit control library (SDK), sample code and GUI
WLI-Unit Calibration Software: Pixel calibration
Recommended analysis software: MCubeMap
Mass
Sensor head: 1.7 kg
Controller: 2.3 kg